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脉冲激光薄膜沉积(PLD)

脉冲激光薄膜沉积(PLD)PulsedLaserDepositionSystems/LaserMBESystemsLaserMBESoftwareSMARTNanoToolPLDTheSVTASMART(ScientificMaterialsandAppliedResearchTool)PulsedLaserDepositionSystemisauniqueversatileresearchtoo

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脉冲激光薄膜沉积(PLD)

Pulsed Laser Deposition Systems / Laser MBE Systems

Laser MBE Software

SMART NanoTool PLD

The SVTA SMART (Scientific Materials and Applied Research Tool) Pulsed Laser Deposition System is a unique versatile research tool. Combining pulsed a Laser Ablation system with other deposition techniques, the SVTA PLD system offers a broad range of materials and applications. The ability to extend the vacuum capabilities to Ultra High Vacuum base pressures allows the control of unwanted film impurities.

The laser target manipulator accommodates up to six 1" diameter targets (or four 2") in vacuum which are selectable through the controlling computer. Each of the individual targets can be rotated about its axis, which together with the laser scanning provides a uniform erosion of the target. Using this flexibility, a multitude of thin film structures is possible.

Several laser options are available through SVTA depending on the application requirements and budget. Optional in-situ monitoring tools such as RHEED provide the user with process feedback in Laser MBE. Available load lock sample handling allows the SMART system to interface with other deposition or metrology tools without exposure of the sample to atmosphere.

For oxide film deposition, to help ensure complete oxidation, the "High Pressure Oxygen Deposition Package" allows the user to set up a partial pressure of O2 in chamber during deposition. Substrate heaters and differential pumping of RHEED electron gun for use in oxygen are also available options.

Pulsed Laser Ablation & Deposition Applications: